常用气体中英文对照名称
常用气体中英文对照名称
符号中文名称英文名称
HF氟化氢hydrogenfluoride
BF3三氟化硼borontrifluoride
WF6六氟化钨TunglstenHexafluoride
NF3三氟化氮nitrogentrifluoride
SF4四氟化硫SulfurTetrafluoride
CLF3三氟化氯ChlorineTrifluoride
POCL3三氯氧化磷Phosphorusoxychloride
HF氟化氢hydrogenfluoride
BF3三氟化硼borontrifluoride
WF6六氟化钨TunglstenHexafluoride
SF4四氟化硫SulfurTetrafluoride
CLF3三氟化氯ChlorineTrifluoride
POCL3三氯氧化磷Phosphorusoxychloride
PH3磷化氢phosphine
C4F6Hexafluorobutadiene
CH2F2二氟甲烷Difluoromethane
C5F8八氟环戊烯octafluoroyclopentene
CH3F氟代甲烷methylfluoride(r41)
SF6六氟化硫SulfurHexafluoride
CO一氧化碳carbonmonoxide
H2氢hydrogen
NO2二氧化氮nitrogentrifluoride
NO一氧化氮nitricoxide
SO2二氧化硫sulfurdioxide
BF3三氟化硼BoronTrifluoride
HF氟化氢HydrogenFluoride
NF3三氟化氮NitrogenTrifluoride
WF6六氟化钨TungstenHexafluoride
SiH4硅烷Silane(SiH4)(LowLevel)
ASH3砷化三氢Arsine
PH3磷化氢phosphine
B2H6硼乙烷diborane
SIH4硅烷SiH4silane
GeH4锗烷GeH4germaniumtrtrahydride
H2Se硒化氢H2SeHydrogenSelenide
TBA特丁基砷化三氢TBATertbutylarsine
AsH3砷化三氢AsH3(干)Arsine
Cl2氯气IICl2chlorine
NO2二氧化氮NO2nitrogentrifluoride
CLO2二氧化氯CLO2
Cl2氯气IIICl2chlorine
Cl2氯气IIICl2chlorine
NO2二氧化氮NO2nitrogentrifluoride
HCL氯化氢HCIhydrogenchioride
HF氟化氢HFHydrogenFluoride
HCL氯化氢HCI(低级别l)hydrogenchioride
HBr溴化氢HBrhydrogenbromide
HI碘化氢HIHydriodicacid
MMH一甲基肼MMH
NH3氨IINH3ammonia
COCL2碳酰氯COCL2Phosgene
H2S硫化氢H2Shydrogensulphide
HCN氰化氢HCNhydrogencyanide
N2H4肼N2H4/Hydrazine
H2S硫化氢H2Shydrogensulphide
H2S硫化氢H2S(低级别)hydrogensulphide
COCL2碳酰氯-高范围XPCOL2Phosgene
NF3三氟化氮NF3(CM4-Ponly)nitrogentrifluoride
BF3三氟化硼BF3(低级别)borontrifluoride
AsH3砷化三氢XPAsH3Arsine
PH3磷化氢XPPH3phosphine
SiH4硅烷XPSiH4silane
B2H6硼乙烷XPB2H6diborane
GeH4锗烷XPGeH4germaniumtrtrahydride
COCL2碳酰氯XPCOCL2Phosgene
F2氟F2fluorine
AsH3砷化三氢/LLXPAsH3(低级别l)Arsine
HBr溴化氢HBr(低级别)hydrogenbromide
TDMAT四(二甲基氨)钛TDMATTitaniumdimethylamide
Cl2氯气Cl2chlorine
H2S硫化氢H2Shydrogensulphide
H2S硫化氢H2S(低级别)hydrogensulphide
H2S硫化氢干H2S/Dhydrogensulphide
TBA特丁基砷化三氢XPTBATertbutylarsine
TBP特丁基磷化氢XPTBPTertbutylphosphine
H2Se硒化氢H2SeHydrogenSelenide
Cl2氯气Cl2XPchlorine
DMA二甲基胺DMA
NO2二氧化氮NO2nitrogentrifluoride
CH3F氟代甲烷CH3Fmethylfluoride(r41)
C5F8八氟环戊烯octafluoroyclopentene
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